Coherence scanning interferometry: linear theory of surface measurement
نویسندگان
چکیده
منابع مشابه
Coherence scanning interferometry: linear theory of surface measurement.
The characterization of imaging methods as three-dimensional (3D) linear filtering operations provides a useful way to compare the 3D performance of optical surface topography measuring instruments, such as coherence scanning interferometry, confocal and structured light microscopy. In this way, the imaging system is defined in terms of the point spread function in the space domain or equivalen...
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2013
ISSN: 1559-128X,2155-3165
DOI: 10.1364/ao.52.003662